Non-destructive, room temperature characterization for wafer-scale semiconductor thin films and devices
Photoreflectance (PR) contactless electroreflectance (CER) spectroscopy is a practical, cost effective method for characterizing semiconductor thin films and real device structures. With unprecedented versatility PR/CER can be used in the development, evaluation, and quality control of a wide variety of advanced III-V and II-VI semiconductor materials, including the group III-Nitrides.
PR/CER is currently in use by several companies for production-line quality control: TRW, Texas Instruments, NORTEL Technologies, and Kopin.
Recently, a new system has been developed which makes possible measurements of photoluminescence and PR/CER without the need to change either sample or optical configurations.